Temescal SuperSource E-Guns—The Industry Standard for Electron Beam Deposition
With their removable crucible covers, Temescal’s Model 3CK, 2CK and 1CK SuperSources offer enhanced versatility, convenience, and dependability in a wide variety of coating applications. The crucible cover exposes only the pocket in evaporation position, reducing the risk of cross-contamination. Crucible cover removal allows speedy source replenishment and makes it easy to clean the crucible and adjacent structures in situ, without risk of cross-contamination. Removing the cover requires only the removal of four screws; it is not necessary to blow the cooling water out of the source beforehand. In addition, once the water is blown out of the source, the crucible can easily be replaced, either with a clean crucible of the same pocket configuration or with a differently configured crucible.
Mounting
Models
- Temescal 3CK, rated up to 12kW
- Temescal 2CK, rated up to 10kW
- Temescal 1CK, rated up to 8kW
- Easily removable/replaceable top plate and crucible
- Side or bottom drive
- Multipocket crucibles are available in numerous configurations
- Continuous-trough carousels, crucibles with banana-shaped pockets, and ‘skillet’-type evaporant holders are also available with the 3CK and 2CK source
- Smaller crucibles are offered for the 1CK gun in 4x7cc and 6x4cc pocket configurations
- Power ratings: 1-12 kW (Model 3CK), 1-10 kW (Model 2CK) and 1-8 kW (Model 1CK)
- Enhanced crucible cooling improves thermal stability during evaporation
- Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
- Adjustable internal and external polepiece extensions optimize beam spot control
Temescal Removable Cover SuperSource Specifications
| Dimensions | See illustration |
|---|---|
| Weight | 23.5 lbs. (10.7 kg) |
| Rotation torque | 10 in.• lbs. (11.5 kg • cm) |
| Max. bakeout temp. | 302° F (150° C) |
| Max. power | 8 kW |
| Acceleration voltage | 4–10 kV |
| Operating pressure | |
| Maximum | 5 X 10-4 torr (6.7 X 10-4 mbar) |
| Minimum | 1 X 10-4 torr (1.33 X 10-4 mbar) |
| Beam characteristics | |
| Deflection | 270° |
| Spot size/shape | From tight oval to diffuse oblong |
| Evaporation rate | 25 kÅ of Aluminum at 10-in. (254-mm) source-to-substrate distance |
| Sweep capability | Longitudinal and lateral when operated with a beam sweep controller |
Installation Requirements |
|
| Input power | |
| Filament current | 70 A at 12 V ac |
| Emission current | 0–1.5 A at 4–10 kV dc (8 kW max.) |
| Cooling water | |
| Max. temperature | 68° F (20° C) |
| Flow rate | 2.75 gpm (0.17 l/sec.) |
| Max. inlet pressure | 100 psi (6.89 bar) |
| Min. delta pressure | 50 psi (3.45 bar) |
| Feedthroughs | |
| High voltage | Two HV feedthroughs rated for 12 kV at 70 A |
| Octal | One octal feedthrough rated for 110 V at 3 A per lead |
| Dual pass | One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes |
| Rotary | One rotary-motion feedthrough with 1/4-in. (6.4-mm) diameter shaft |
Representative Deposition Rates
The chart below shows deposition rates obtained using Temescal sources such as the 2PT and the 3PT. Consult Temescal for detailed information about how deposition rate and uniformity are affected by source operating volt age, beam sweep and density, and other fundamental process variables.
Deposition Rates of Various Materials from Temescal Sources*
*25-cc pockets used in all tests. Source-to-substrate distance: 250 mm
Model 1CK Dimensions
Model 2CK Dimensions
Model 3CK Dimensions
Temescal Model 2CK and 3CK Removable Cover SuperSources
When ordering a Temescal e-gun, you need to follow this process:
Step 1
Specify a source
Step 2
Specify a crucible
Step 3
Specify a crucible cover
For each source you wish to order, you must select part numbers for:
- A base unit
- An emitter
- A spare parts kit
After selecting your source, crucible and cover, please select any accessories that you would like to add to your order.
3CK SuperSource—Base Unit* and Emitter
3CK SuperSource—Crucible Cover
2CK and 3CK Source Accessories
-
Feedthrough Kit for Turret Guns
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Items to be included in your quote request
2CK SuperSource—Base Unit* and Emitter
2CK SuperSource—Crucible
-
8 x 7cc pockets Crucible
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6 x 7cc pockets Crucible
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6 x 15cc pockets Crucible
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6 x 13cc pockets Crucible
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4 x 25cc pockets Crucible
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4 x 15cc pockets Crucible
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3 x 7cc + 3 x 15cc pockets Crucible
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3 x 15cc + 1 x 25cc pockets Crucible
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2 x 7cc + 2 x 15cc pockets Crucible
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2 x 25cc + 1 x 70cc ‘banana’ Crucible
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2 x 15cc + 2 x 25cc pockets Crucible
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2 x 15cc + 1 x 50cc ‘banana’ Crucible
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2CK SuperSource—Crucible Cover
Items to be included in your quote request
1CK—Base Unit
1CK Crucible
1CK Crucible Cover
1CK Optional Source Accessories
-
Feedthrough Kit for Turret Guns
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