The EV M-10 High-Capacity Multi-Hearth Source
The EV M-10 is the new high capacity Electron Beam source, designed by FerroTec Germany. It has been designed for applications requiring the deposition large amounts of material as well as large volume vacuum coating chambers. This source incorporates well proven e-beam technology including water cooling, rotary drive and magnetic components. Moreover, its newly designed source body, crucibles and the filament block result in a more efficient and effective operation.
- Directly cooled crucibles with large capacity
- Customer specified crucibles can be manufactured
- High efficiency emitter assembly
- Standard beam deflection system with optimized magnetic field
by High Accuracy Magnetic Field Modeling
Designed for Versatility
The EV M-10 is used for optical, electronic and high rate deposition processes. Several standard crucible sizes are offered. If our standard crucibles do not fit your application requirements, FerroTec can design customized crucibles for you. This universal evaporator can be attached to most control systems and power supplies.
Optimized for optical and electronic applications, the EV M-10 is ideal for use in large systems that produce high quality filters and metal layers. Evaporation rates up to 70 nm/sec are possible (e.g. Titanium @ 6 KW has an evaporation rate of 70 nm/sec in a distance of 250 mm source to quartz). Using a crucible with four, six, or eight hearths, the quantity is 60cc, 40cc, or 20cc (respectively) per hearth.
Simple to maintain
Ti > 42.000 Å/min @ 6 kW
AI > 12.000 Å/min @ 10 kW
(250 mm source – substrate distance)