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Feature, Parameter, or Specification XTC/3S Single Layer XTC/3M Multiple Layer
Frequency change measurement resolution 0.028 Hz 0.028 Hz
Measurement interval .25 seconds .25 seconds
Thickness & rate resolution / measurement 0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
Measurement technology ModeLock ModeLock
Number of processes 1 99
Number of layers 1 999
Number of material programs (or Films) 9 32
Number of sensor inputs 2 standard 2 standard
CrystalSix / Crystal 12 sensor support Yes Yes
Support XTAL2 switch Yes Yes
Number of source outputs 2 standard 2 standard
Computer communications RS232 standard, Ethernet TCP/IP optional RS232 standard, Ethernet TCP/IP optional
Max RS232 baud rate 115.2 Kbaud 115.2 Kbaud
Automatic crystal switch Yes Yes
Number of relays 12 standard, not event assignable 12 standard, event assignable
Number of programmable relay functions 1 1
Functions per relay 1 1
Relay voltage rating 30VDC or 30VAC RMS or 42V peak at 2.5 Amps 30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Number of inputs 8 TTL, 24VDC Max 8 TTL, 24VDC Max
Number of programmable input functions 1, not event assignable 1, event assignable
Number of recorder outputs 1 1
Manual power / hand held controller Yes Yes
Exhaust fan No exhaust fan No exhaust fan
Test mode Yes Yes
Shutter delay Yes Yes
Secondary tooling Yes Yes
Crystal starting frequency 6 MHz 6 MHz
Maximum allowed frequency shift 1.0 MHz 1.0 MHz
Case dimensions half rack, 2U high half rack, 2U high
Rate and thickness display resolution 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film select via inputs Yes No
User guide languages English, Chinese English, Chinese
Control loops PID PID
Software to operate from PC Yes Yes
Datalogging Yes Yes
Quality and stability function Yes Yes
Sample and hold (RateWatcher) Yes Yes
Crucible selection Yes Yes
Crucible feedback input Yes Yes
Select control voltage polarity Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program lock code Yes Yes
CrystalSix / Crystal 12 sensor support Yes Yes
Display with graphics Yes Yes
User labeled processes (cell phone style alphanumeric entry) No Yes
User Labeled Films (cell phone style alphanumeric entry) No Yes
Transfer sensor control Yes Yes
XTC/2 RS232 communications compatibility Yes (limited) Yes (limited)

XTC 3 Ordering Information

Product Capacity Catalog # Add product
XTC/3S deposition controller
Single layer model supports up to 9 films, 2 sensors and two sources
9401-0236-0
XTC/3M deposition controller
Multiple layer model supports up to 99 processes,
999 layers, 32 films, 2 sensors and two sources.
9401-0237-0
Rack mount kit for XTC/3
Provides all hardware/bracket needed for mounting the XTC/3 in a standard 19-inch electronics rack
0628-6443-0


XTC/3 parts and sccessories

Product Capacity Catalog # Add product
XTC/3 oscillator and 15ft cable
Oscillator and 15 foot coaxial cable for the XTC/3
9999-0781-0
XTC/3 oscillator and 30ft cable
Oscillator and 30-foot coaxial cable for the XTC/3
9401-0237-0
Inficon-type standard sensor kit
Quartz crystal sensor with single sensor head; includes integral water lines,
tool for bending water lines, crystal snatcher, cozxial cable, and five spare crystals
9999-0789-0
Inficon-type dual sensor kit
Crystal sensor with two crystals in one sensor head; designed specifically to support
CrystalSwitch function; includes integral water lines, bending tool, coaxial cable,
crystal snatcher, five spare crystals, and a pneumatically actuated shutter.
Note: Use of this sensor requires two oscillators and a shutter control valve,
all of which must be ordered separately.
9999-7242-0
Standard feedthrough for inficon sensors
Standard 1-in bolt-hole feedthrough with O-ring seal,
two water lines and one coaxial interconnection
9999-0790-0
Pneumatic shutter control valve
For use with dual sensor head;
mounts directly to sensor feedthrough; includes bracket and tubing adapter
9010-0007-0
O-ring sealed feedthrough for Inficon dual sensor
Standard 1-in. bolt-hole feedthrough with O-ring seal for use with Inficon’s dual sensor head;
contains two ater lines, one air lin, and two coaxial interconnections
0515-6482-1


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