A Thin Film Deposition Controller for Single and
Multiple-layer Processes
Now get everthing you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation and extremely high reliability to ensure productivity.
- Available in single-layer and multiple-layer models.
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping.
- Supports Inficon Crystal 12™, CrystalSix® and dual sensor automatic crystal switching for maximum productivity.
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors and 2 sources.
- XTC/3S single-layer model supports up to 9 films, 2 sensors and 2 sources.
- Easy-to-read TFT LCD graphics displays.
- Films and processes can be assigned unique, descriptive names for easy retrieval.
- Ethernet connection available
- Free-standing (no computor necessary) or optional Windows® software for PC operation.
- Plug-and-play replacement for Inficon XTC/2 controllers (limited to XTC/2 features and command set).
| Feature, Parameter, or Specification | XTC/3S Single Layer | XTC/3M Multiple Layer |
|---|---|---|
| Frequency change measurement resolution | 0.028 Hz | 0.028 Hz |
| Measurement interval | .25 seconds | .25 seconds |
| Thickness & rate resolution / measurement | 0.034 Angstroms @Tooling/density = 100, fundamental frequency = 6 MHz |
0.034 Angstroms @Tooling/density = 100, fundamental frequency = 6 MHz |
| Measurement technology | ModeLock | ModeLock |
| Number of processes | 1 | 99 |
| Number of layers | 1 | 999 |
| Number of material programs (or Films) | 9 | 32 |
| Number of sensor inputs | 2 standard | 2 standard |
| CrystalSix / Crystal 12 sensor support | Yes | Yes |
| Support XTAL2 switch | Yes | Yes |
| Number of source outputs | 2 standard | 2 standard |
| Computer communications | RS232 standard, Ethernet TCP/IP optional | RS232 standard, Ethernet TCP/IP optional |
| Max RS232 baud rate | 115.2 Kbaud | 115.2 Kbaud |
| Automatic crystal switch | Yes | Yes |
| Number of relays | 12 standard, not event assignable | 12 standard, event assignable |
| Number of programmable relay functions | 1 | 1 |
| Functions per relay | 1 | 1 |
| Relay voltage rating | 30VDC or 30VAC RMS or 42V peak at 2.5 Amps | 30VDC or 30VAC RMS or 42V peak at 2.5 Amps |
| Number of inputs | 8 TTL, 24VDC Max | 8 TTL, 24VDC Max |
| Number of programmable input functions | 1, not event assignable | 1, event assignable |
| Number of recorder outputs | 1 | 1 |
| Manual power / hand held controller | Yes | Yes |
| Exhaust fan | No exhaust fan | No exhaust fan |
| Test mode | Yes | Yes |
| Shutter delay | Yes | Yes |
| Secondary tooling | Yes | Yes |
| Crystal starting frequency | 6 MHz | 6 MHz |
| Maximum allowed frequency shift | 1.0 MHz | 1.0 MHz |
| Case dimensions | half rack, 2U high | half rack, 2U high |
| Rate and thickness display resolution | 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A | 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A |
| Film select via inputs | Yes | No |
| User guide languages | English, Chinese | English, Chinese |
| Control loops | PID | PID |
| Software to operate from PC | Yes | Yes |
| Datalogging | Yes | Yes |
| Quality and stability function | Yes | Yes |
| Sample and hold (RateWatcher) | Yes | Yes |
| Crucible selection | Yes | Yes |
| Crucible feedback input | Yes | Yes |
| Select control voltage polarity | Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution | Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution |
| Program lock code | Yes | Yes |
| CrystalSix / Crystal 12 sensor support | Yes | Yes |
| Display with graphics | Yes | Yes |
| User labeled processes (cell phone style alphanumeric entry) | No | Yes |
| User Labeled Films (cell phone style alphanumeric entry) | No | Yes |
| Transfer sensor control | Yes | Yes |
| XTC/2 RS232 communications compatibility | Yes (limited) | Yes (limited) |
XTC 3 Ordering Information
XTC/3 parts and accessories
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XTC/3 Oscillator and 30ft Cable
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XTC/3 Oscillator and 15ft Cable
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Standard Feedthrough for Inficon Sensors
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Pneumatic Shutter Control Valve
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O-ring Sealed Feedthrough for Inficon Dual Sensor
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Inficon-type Standard Sensor Kit
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Inficon-type Dual Sensor Kit
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