Single Pocket and Ultra-High Vacuum Electron Beam Gun

Temescal’s single-crucible guns provide adjustable beam spot size, beam sweep capability, an easily replaced emitter and filament, a wide range of crucible capacities, and flush pole-piece design to minimize evaporant buildup. Water cooling of the crucible creates a solid evaporant layer at the crucible-evaporant interface, preventing contamination of the evaporant by the crucible’s copper.

Mounting

Standard Vacuum

  • SFIH-270-1, 10kW max power
  • SFIH-270-2, 12kW max power
  • SFIH-270-3, 20kW max power

Ultra-high vacuum

  • UHVC-270-1, 10kW max power
  • UHVC-270-2, 12kW max power
  • UHVC-270-3, 20kW max power
  • Uniform, efficient evaporation
  • High reliability plus easy maintenance
  • Adjustable beam sport size
  • 270°, permanent-magnet deflection
  • Longitudinal and lateral beam-sweep capability when operated with a sweep controller
  • Flush pole-piece design minimizes evaporant build-up on source and facilitates loading of chunk materials
  • Gun body made of water-cooled copper for maximum heat transfer rates
  • Wire-feed capability for extended evaporant inventory
  • Hopper-type crucible design, conical, with a flat bottom
  • Plug-in emitter assembly facilitates filament replacement

 

All Single-Pocket Supersources

The following specifications apply to all three standard single-pocket SuperSources (SFIH-270-1, -2, and -3) as well as to the three UHV models (UHVC-270-1, -2, and -3).

1 Sources2 SourcesSources
Typical evaporation rate25 kÅ/min. of Al; source power, 10 kW; source-to-substrate distance, 10 in. (254 mm)35 kÅ/min. of Al; source power, 6–12 kW; source-to-substrate distance, 10 in. (254 mm)50 kÅ/min. of Al; source, 12–20 kW; source-to-substrate distance, 10 in. (254 mm)
Max. power10 kW at 10 kV12 kW at 10 kV20 kW at 10 kV
Emission current0–1 A0–1.4 A0–2 A
Crucible capacity7 cc40 cc156 cc
Weight11.5 lbs. (5.2 kg)14 lbs. (6.4 kg)21 lbs. (9.5 kg)
Power requirements
High voltage4–10 kV dc at 0–1 A4–10 kV dc at 0–1.4 A4–10 kV dc at 0–2 A
Filament power12 V ac at 50 A12 V ac at 50 A12 V ac at 75 A
Cooling water requirements
Inlet water lines3/8-in. (9.5-mm) OD3/8-in. (9.5-mm3/8-in. (9.5-mm) OD12 V ac at 75 A
Flow rateFiltered, 3 gpm (11.4 l/m)Filtered, 4 gpm (15.1 l/m)Filtered, 5 gpm (18.9 l/m)
Max. inlet pressure100 psig (7.0 kg/cm2) at
<70° F (<21° C)
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
Min. pressure differential40 psig (2.8 kg/cm2)40 psig (2.8 kg/cm2)40 psig (2.8 kg/cm2)
Standard single-pocket sources only
The following specifications apply only to the three standard single-pocket sources (SFIH-270-1, -2, and -3)
Operating pressure
Maximum5 X 10-4 torr
(6.7 X 10-4 mbar))
Minimum1 X 10-8 torr
(1.33 X 10-8 mbar)
Feedthroughs
Two HV feedthroughs rated for 12 kV at 70 A
One octal feedthrough rated for 600 V at 15 A per lead
One dual-pass water feedthrough with 3/8-in. (9.5-mm) OD tub
UHS sources only
The following specifications apply only to the three UHV sources (UHVC-270-1, -2, and -3).
Flanges1.33-in. Conflat, rotary
Bakeout temperature395° F (200° C)

Temescal Single-Pocket SuperSources: Dimensions

 

Temescal single-pocket electron beam SuperSources

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Base Unit/Emitter/Spare Parts Kit

Source Accessories

UHV Electron Beam Guns

Items to be included in your quote request