Single Pocket and Ultra-High Vacuum Electron Beam Gun

Temescal’s single-crucible guns provide adjustable beam spot size, beam sweep capability, an easily replaced emitter and filament, a wide range of crucible capacities, and flush pole-piece design to minimize evaporant buildup. Water cooling of the crucible creates a solid evaporant layer at the crucible-evaporant interface, preventing contamination of the evaporant by the crucible’s copper.

Mounting

Standard Vacuum

  • SFIH-270-1, 10kW max power
  • SFIH-270-2, 12kW max power
  • SFIH-270-3, 20kW max power

Ultra-high vacuum

  • UHVC-270-1, 10kW max power
  • UHVC-270-2, 12kW max power
  • UHVC-270-3, 20kW max power
  • Uniform, efficient evaporation
  • High reliability plus easy maintenance
  • Adjustable beam sport size
  • 270°, permanent-magnet deflection
  • Longitudinal and lateral beam-sweep capability when operated with a sweep controller
  • Flush pole-piece design minimizes evaporant build-up on source and facilitates loading of chunk materials
  • Gun body made of water-cooled copper for maximum heat transfer rates
  • Wire-feed capability for extended evaporant inventory
  • Hopper-type crucible design, conical, with a flat bottom
  • Plug-in emitter assembly facilitates filament replacement

 

All Single-Pocket Supersources

The following specifications apply to all three standard single-pocket SuperSources (SFIH-270-1, -2, and -3) as well as to the three UHV models (UHVC-270-1, -2, and -3).

1 Sources 2 Sources Sources
Typical evaporation rate 25 kÅ/min. of Al; source power, 10 kW; source-to-substrate distance, 10 in. (254 mm) 35 kÅ/min. of Al; source power, 6–12 kW; source-to-substrate distance, 10 in. (254 mm) 50 kÅ/min. of Al; source, 12–20 kW; source-to-substrate distance, 10 in. (254 mm)
Max. power 10 kW at 10 kV 12 kW at 10 kV 20 kW at 10 kV
Emission current 0–1 A 0–1.4 A 0–2 A
Crucible capacity 7 cc 40 cc 156 cc
Weight 11.5 lbs. (5.2 kg) 14 lbs. (6.4 kg) 21 lbs. (9.5 kg)
Power requirements
High voltage 4–10 kV dc at 0–1 A 4–10 kV dc at 0–1.4 A 4–10 kV dc at 0–2 A
Filament power 12 V ac at 50 A 12 V ac at 50 A 12 V ac at 75 A
Cooling water requirements
Inlet water lines 3/8-in. (9.5-mm) OD 3/8-in. (9.5-mm3/8-in. (9.5-mm) OD 12 V ac at 75 A
Flow rate Filtered, 3 gpm (11.4 l/m) Filtered, 4 gpm (15.1 l/m) Filtered, 5 gpm (18.9 l/m)
Max. inlet pressure 100 psig (7.0 kg/cm2) at
<70° F (<21° C)
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
Min. pressure differential 40 psig (2.8 kg/cm2) 40 psig (2.8 kg/cm2) 40 psig (2.8 kg/cm2)
Standard single-pocket sources only
The following specifications apply only to the three standard single-pocket sources (SFIH-270-1, -2, and -3)
Operating pressure
Maximum 5 X 10-4 torr
(6.7 X 10-4 mbar))
Minimum 1 X 10-8 torr
(1.33 X 10-8 mbar)
Feedthroughs
Two HV feedthroughs rated for 12 kV at 70 A
One octal feedthrough rated for 600 V at 15 A per lead
One dual-pass water feedthrough with 3/8-in. (9.5-mm) OD tub
UHS sources only
The following specifications apply only to the three UHV sources (UHVC-270-1, -2, and -3).
Flanges 1.33-in. Conflat, rotary
Bakeout temperature 395° F (200° C)

Temescal Single-Pocket SuperSources: Dimensions

 

Temescal single-pocket electron beam SuperSources

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Base Unit/Emitter/Spare Parts Kit

Source Accessories

UHV Electron Beam Guns

Items to be included in your quote request