Single Pocket and Ultra-High Vacuum Electron Beam Gun
Temescal’s single-crucible guns provide adjustable beam spot size, beam sweep capability, an easily replaced emitter and filament, a wide range of crucible capacities, and flush pole-piece design to minimize evaporant buildup. Water cooling of the crucible creates a solid evaporant layer at the crucible-evaporant interface, preventing contamination of the evaporant by the crucible’s copper.
Mounting
Standard Vacuum
- SFIH-270-1, 10kW max power
- SFIH-270-2, 12kW max power
- SFIH-270-3, 20kW max power
Ultra-high vacuum
- UHVC-270-1, 10kW max power
- UHVC-270-2, 12kW max power
- UHVC-270-3, 20kW max power
- Uniform, efficient evaporation
- High reliability plus easy maintenance
- Adjustable beam sport size
- 270°, permanent-magnet deflection
- Longitudinal and lateral beam-sweep capability when operated with a sweep controller
- Flush pole-piece design minimizes evaporant build-up on source and facilitates loading of chunk materials
- Gun body made of water-cooled copper for maximum heat transfer rates
- Wire-feed capability for extended evaporant inventory
- Hopper-type crucible design, conical, with a flat bottom
- Plug-in emitter assembly facilitates filament replacement
All Single-Pocket Supersources
The following specifications apply to all three standard single-pocket SuperSources (SFIH-270-1, -2, and -3) as well as to the three UHV models (UHVC-270-1, -2, and -3).
1 Sources | 2 Sources | 3 Sources | |
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Typical evaporation rate | 25 kÅ/min. of Al; source power, 10 kW; source-to-substrate distance, 10 in. (254 mm) | 35 kÅ/min. of Al; source power, 6–12 kW; source-to-substrate distance, 10 in. (254 mm) | 50 kÅ/min. of Al; source, 12–20 kW; source-to-substrate distance, 10 in. (254 mm) |
Max. power | 10 kW at 10 kV | 12 kW at 10 kV | 20 kW at 10 kV |
Emission current | 0–1 A | 0–1.4 A | 0–2 A |
Crucible capacity | 7 cc | 40 cc | 156 cc |
Weight | 11.5 lbs. (5.2 kg) | 14 lbs. (6.4 kg) | 21 lbs. (9.5 kg) |
Power requirements | |||
High voltage | 4–10 kV dc at 0–1 A | 4–10 kV dc at 0–1.4 A | 4–10 kV dc at 0–2 A |
Filament power | 12 V ac at 50 A | 12 V ac at 50 A | 12 V ac at 75 A |
Cooling water requirements | |||
Inlet water lines | 3/8-in. (9.5-mm) OD | 3/8-in. (9.5-mm3/8-in. (9.5-mm) OD | 12 V ac at 75 A |
Flow rate | Filtered, 3 gpm (11.4 l/m) | Filtered, 4 gpm (15.1 l/m) | Filtered, 5 gpm (18.9 l/m) |
Max. inlet pressure | 100 psig (7.0 kg/cm2) at <70° F (<21° C) |
100 psig (7.0 kg/cm2) at <70° F (<21° C) |
100 psig (7.0 kg/cm2) at <70° F (<21° C) |
Min. pressure differential | 40 psig (2.8 kg/cm2) | 40 psig (2.8 kg/cm2) | 40 psig (2.8 kg/cm2) |
Standard single-pocket sources only The following specifications apply only to the three standard single-pocket sources (SFIH-270-1, -2, and -3) |
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Operating pressure | |||
Maximum | 5 X 10-4 torr (6.7 X 10-4 mbar)) |
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Minimum | 1 X 10-8 torr (1.33 X 10-8 mbar) |
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Feedthroughs | |||
Two HV feedthroughs rated for 12 kV at 70 A | |||
One octal feedthrough rated for 600 V at 15 A per lead | |||
One dual-pass water feedthrough with 3/8-in. (9.5-mm) OD tub | |||
UHS sources only | |||
The following specifications apply only to the three UHV sources (UHVC-270-1, -2, and -3). | |||
Flanges | 1.33-in. Conflat, rotary | ||
Bakeout temperature | 395° F (200° C) |
Temescal Single-Pocket SuperSources: Dimensions
Base Unit/Emitter/Spare Parts Kit
Source Accessories
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Feedthrough Kit for Fixed-Pocket Guns
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UHV Electron Beam Guns
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UHVC-270-3 One 156-cc pocket; 20-kW rating
Read more -
UHVC-270-2 One 40-cc pocket; 14-kW rating
Read more -
UHVC-270-1 One 7-cc pocket; 10-kW rating
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