A Thin Film Deposition Controller for Single and Multiple-layer Processes

Now get everthing you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation and extremely high reliability to ensure productivity.

  • Available in single-layer and multiple-layer models.
  • Patented ModeLock technology prevents film thickness errors caused by mode-hopping.
  • Supports Inficon Crystal 12™, CrystalSix® and dual sensor automatic crystal switching for maximum productivity.
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors and 2 sources.
  • XTC/3S single-layer model supports up to 9 films, 2 sensors and 2 sources.
  • Easy-to-read TFT LCD graphics displays.
  • Films and processes can be assigned unique, descriptive names for easy retrieval.
  • Ethernet connection available
  • Free-standing (no computor necessary) or optional Windows® software for PC operation.
  • Plug-and-play replacement for Inficon XTC/2 controllers (limited to XTC/2 features and command set).

Feature, Parameter, or SpecificationXTC/3S Single LayerXTC/3M Multiple Layer
Frequency change measurement resolution0.028 Hz0.028 Hz
Measurement interval.25 seconds.25 seconds
Thickness & rate resolution / measurement0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
Measurement technologyModeLockModeLock
Number of processes199
Number of layers1999
Number of material programs (or Films)932
Number of sensor inputs2 standard2 standard
CrystalSix / Crystal 12 sensor supportYesYes
Support XTAL2 switchYesYes
Number of source outputs2 standard2 standard
Computer communicationsRS232 standard, Ethernet TCP/IP optionalRS232 standard, Ethernet TCP/IP optional
Max RS232 baud rate115.2 Kbaud115.2 Kbaud
Automatic crystal switchYesYes
Number of relays12 standard, not event assignable12 standard, event assignable
Number of programmable relay functions11
Functions per relay11
Relay voltage rating30VDC or 30VAC RMS or 42V peak at 2.5 Amps30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Number of inputs8 TTL, 24VDC Max8 TTL, 24VDC Max
Number of programmable input functions1, not event assignable1, event assignable
Number of recorder outputs11
Manual power / hand held controllerYesYes
Exhaust fanNo exhaust fanNo exhaust fan
Test modeYesYes
Shutter delayYesYes
Secondary toolingYesYes
Crystal starting frequency6 MHz6 MHz
Maximum allowed frequency shift1.0 MHz1.0 MHz
Case dimensionshalf rack, 2U highhalf rack, 2U high
Rate and thickness display resolution0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film select via inputsYesNo
User guide languagesEnglish, ChineseEnglish, Chinese
Control loopsPIDPID
Software to operate from PCYesYes
Quality and stability functionYesYes
Sample and hold (RateWatcher)YesYes
Crucible selectionYesYes
Crucible feedback inputYesYes
Select control voltage polarityYes, +/- 2.5, 5, 10 Volts; 15-bit ResolutionYes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program lock codeYesYes
CrystalSix / Crystal 12 sensor supportYesYes
Display with graphicsYesYes
User labeled processes (cell phone style alphanumeric entry)NoYes
User Labeled Films (cell phone style alphanumeric entry)NoYes
Transfer sensor controlYesYes
XTC/2 RS232 communications compatibilityYes (limited)Yes (limited)

XTC 3 Ordering Information

XTC/3 parts and accessories

Items to be included in your quote request